Microelectromechanical Systems

Microelectromechanical Systems

Advanced Materials and Fabrication Methods

eBook - 1997
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Gardners
Microelectromenchanical systems (MEMS) is a field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. MEMS is a multidisciplinary field involving challenges and opportunities for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry.

Publisher: Washington, DC : National Academy Press, 1997
ISBN: 9780309059800
0309059801
9780585002507
0585002509
0309058856
9780309058858
0309058956
Characteristics: 1 online resource (xiv, 61 pages) : illustrations
data file,rda

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